Development of MEMS-based digital geophone and analysis of its performance

Digital geophones with domestically made MEMS acceleration sensor were tested and compared with conventional geophones in field operation. Methods for testing and analyzing the behaviors of MEMS geophones are developed.The performance differences between domestic MEMS geophones and conventional ones as well as field test and real data processing are studied, it is shown that domestic MEMS geophones are superior to conventional ones in frequency response,especially for signals with frequency of less that 10 Hz. Its cross axis isolation is higher than that of conventional geophone by one order of the magnitude. Suggestions for the improvement of domestic MEMS accelerometers are presented based on the analysis performed on the data from the field test.